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LCI Publisher Universitaet Hamburg

Index Name

Aoyama, Tetsuo

Alternative Writings

Aoyama, T.

Co-authors

Abe, Hisaki;   Hashimoto, Ryou;   Karita, Tetsuya;   Maruyama, Taketo;   Nohara, Masahiro;   Oketani, Taimi

Publication Titles

1999: Composition of resist-remover for semiconductor device and liquid crystal display fabrications
2000: Novel detergent and cleaning method using it
2002: Composition for removal of photoresist in a wiring process for semiconductor devices


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